I.M. Grodnensky: search on Z-Library

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1

As quantum wires

Grodnensky, I., Heitmann, D., Klitzing, K. v., Ploog, K., Rudenko, A., Kamaev, A.

Journal:

Physical Review B

Year:

1994

Language:

english

File:

PDF, 253 KB

english, 1994

2

Towards 280 nm i-line random logic lithography with off-axis illumination and optical proximity correction

Year:

1997

Language:

english

File:

PDF, 434 KB

english, 1997

3

Dynamical response of a two-dimensional electron system in a strong magnetic field

Grodnensky, I. M., Heitmann, D., von Klitzing, K., Kamaev, A. Yu.

Journal:

Physical Review B

Year:

1991

Language:

english

File:

PDF, 155 KB

english, 1991

4

SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 22 February 1998)] Optical Microlithography XI - Characterization of spatial coherence uniformity in exposure tools

Grodnensky, Ilya M., Morita, Etsuya, Suwa, Kyoichi, Hirukawa, Shigeru, Van den Hove, Luc

Year:

1998

Language:

english

File:

PDF, 266 KB

english, 1998

5

SPIE Proceedings [SPIE 16th Annual BACUS Symposium on Photomask Technology and Management - Redwood City, CA (Wednesday 18 September 1996)] 16th Annual BACUS Symposium on Photomask Technology and Management - Lithography tricks and tribulations

Garofalo, Joseph G., Watson, Pat G., Trimble, Lee E., Cirelli, Raymond A., Colina, Albert, Grodnensky, Ilya M., Herrero, B., Dunbar, A., Peiffer, Frederick R., Takahashi, R., Tarascon-Auriol, Regine G

Year:

1996

Language:

english

File:

PDF, 353 KB

english, 1996

6

Properties of edge magnetoplasmons in a degenerate 2d electron gas

I.M. Grodnensky, A.Yu. Kamaev

Journal:

Surface Science

Year:

1990

Language:

english

File:

PDF, 369 KB

english, 1990

7

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Metrology, Inspection, and Process Control for Microlithography XVI - Evaluation of lithographic imaging performance by optical area measurement

Grodnensky, Ilya, Mizutani, Shinji, Slonaker, Steve D., Herr, Daniel J. C.

Year:

2002

Language:

english

File:

PDF, 187 KB

english, 2002

8

Single-particle and many-body effects in the edge magnetoplasma excitations of a two-dimensional electron system

I. Grodnensky, D. Heitmann, K. von Klitzing

Journal:

Surface Science

Year:

1992

Language:

english

File:

PDF, 354 KB

english, 1992

9

SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA (Monday 10 March 1997)] Optical Microlithography X - Control and uniformity of 280-nm features in i-line lithography using optical proximity corrections and off-axis illumination

Watson, Pat G., Garofalo, Joseph G., Hansen, M., Grodnensky, Ilya M., Zych, Ludwik J., Takahashi, R., Yarbrough, Willie J., Ehrlacher, Edward, Reim, A., Vella, R. M., Dunbar, A., Colina, Albert, Herre

Year:

1997

Language:

english

File:

PDF, 1.27 MB

english, 1997

10

Controlling sub-100-nm lithographic imaging performance by optical area measurement

I. Grodnensky, S. Mizutani, S. Slonaker

Journal:

Microelectronic Engineering

Year:

2002

Language:

english

File:

PDF, 238 KB

english, 2002

11

Nonlocal dispersion of edge magnetoplasma excitations in a two-dimensional electron system

Grodnensky, I., Heitmann, D., von Klitzing, K.

Journal:

Physical Review Letters

Year:

1991

Language:

english

File:

PDF, 756 KB

english, 1991

12

Technique for optical characterization of exposure tool imaging performance down to 100 nm

I. Grodnensky, K. Suwa, N. Farrar, E. Johnson, J. Pan

Year:

1999

Language:

english

File:

PDF, 495 KB

english, 1999

13

[IEEE 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 - Boston, MA, USA (30 April-2 May 2002)] 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) - Controlling lithographic imaging performance at sub-100 nm CD with optical measurements

Grodnensky, I., Enayati, S., Manka, J., Mizutani, S., Slonaker, S.

Year:

2002

Language:

english

File:

PDF, 333 KB

english, 2002

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